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home Best Technology / Wet Benches / Fume Hoods for Wet Chemical Processing of Semiconductors and Other Applications / Wet Bench for Semiconductor & Other FM4910 Applications

Wet Bench for Semiconductor & Other FM4910 Applications

  • System Description
  • Common Applications
  • Common Configurations

Best Technology offers wet benches for semiconductor manufacturing and chemical handling of various applications, including electro-chemical processing, acid processing and chemical wet process applications. Typical construction materials include polypropylene, stainless steel, PVDF, PVC-C as well as Teflon®, PFA, and  ECTFE (HALAR®) depending on the chemical handling properties. Our semiconductor wet bench equipment conforms to UL2360/FM4910 standards if required for the application.

Semiconductor Wafer Chemical Processing FM4910 Wet Bench & Fume Hood

Semiconductor Wet Bench for Wafer Chemical Processing

This integrated semiconductor wet bench has in-tank cross flow exhaust allowing for cleaning, rinsing, acid processing and final rinsing in an open top wet bench.

What are UL2360/FM4910 standards?

Increasingly complex manufacturing processes are required to continue innovation of smaller and smaller semiconductor circuit boards and chips. Contamination of cleanrooms of any kind can be catastrophic and contamination caused by fire and smoke is no different.

FM-4910 designation is given to a material that passes the Factory Mutual test for fire propagation, and smoke density. Even the most advanced expensive fire suppression systems of the past could not contain the contamination caused to other processes and products in neighboring areas. Proportionally increasing insurance costs to protect manufacturers in the event of fire and mass contamination have become equally expensive and have driven the construction of wet benches to use less flammable materials and eliminate the costly fire suppression systems.

The Cleanroom Materials Flammability Test Protocol (Class 4910) contains the method for conducting tests. Now, wet bench manufacturers and users can apply the cleanroom protocol to develop plastic materials and equipment capable of resisting fire, emitting little, if any smoke, and producing little, if any, corrosive by-products.

Materials passing the cleanroom protocol, subsequently, can be listed in the Approval Guide, a publication of FM Approvals. Materials that have been approved by Factory Mutual FM-4910, and have been certified include:

  • Most Common
    • PVC-C Polyvinylchloride
    • PVDF
  • Others
    • CP7-D Polypropylene
    • Takiron PVC and CPVC
    • Boltaron PVC
    • Halar

Enclosed Wet Bench for Semiconductor Chemical Processing  with Exhaust

Semiconductor Wet Bench for Chemical ProcessingAbove enclosed semiconductor wet bench allows for post-clean chemical processing, rinsing, nitric acid neutralization, and a final rinse.

Enclosed Acid Wet Bench Hood with Rear & Top Exhaust

Semiconductor Wet Bench / Fume HoodThis system includes cascade overflow rinse stations and side flow and top exhaust.

Integrated multistage wet benches allow for complete part processing through various wash, rinse, and chemical wafer processing steps.

Common Applications for Semiconductor Wet Benches and Chemical Handling Benches

  • Semiconductor Wafer Chemical Processing FM4910 Wet Bench & Fume Hood
  • Nitric acid chemical treatment of semiconductor wafers
  • HF (Hydrofluoric acid) chemical treatment of semiconductor parts
  • Printed circuit board and silicon semiconductor photoresist stripping using chemistry like ACT970 etch residue remover and others

Common Configurations

Since wet bench equipment is made from highly customizable materials like polypropylene, stainless steel, PVDF, PVC-C as well as Teflon®, PFA, and  ECTFE (HALAR®), Best Technology is able to easily build a wet bench to fit the customer specific wet processing chemical requirements.

Specific material grades are required for FM4910 and UL2360 compliance.  FM 4910 and UL 2360 testing protocols were adopted in the 2002 NFPA Standard 318, section A.10.5.1.2 and have driven the industry to new materials used for equipment manufactured for flammable chemistry processing as described above. Our wet benches ensure well-ventilated process enclosures for repeatable surface treatment processes for semiconductor, medical device and aerospace metal parts.

Latest News & Products from Best Technology

Semi-Automated Inline Citric Passivation Solution with Data Tracking

For one medical device manufacturer, the design of a citric passivation solution faced two major challenges: The manufacturing process required performing a water-break test after cleaning parts, before proceeding to passivation. This meant that they could not use a fully automated passivation solution. The system had to have data tracking for quality control purposes. Semi-Automated […]

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      • Phosphating Lines
      • Oil Removal Systems
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      • Machine Shop Parts Washer for True Oil
      • Automotive Parts Washer System
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      • How Clean is Clean?
      • How Do Ultrasonic Cleaners Work?
    • Products
      • Ultrasonic Benchtop Parts Cleaner
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      • Ultrasonic Cleaning Consoles
      • Automated Ultrasonic Parts Cleaning Equipment Wash-Rinse-Dry
      • Large Ultrasonic Cleaner with Agitated Immersion
      • Immersible Ultrasonic Transducers
      • Vapor Degreasers
    • Case Studies
      • Machine Shop Parts Washer for Swiss and CNC Precision Parts
      • Applicable Articles
  • Passivation Equipment
    • Product Information
      • What is Passivation? How Does It Work?
      • Nitric vs. Citric Acid Passivation
      • CitriSurf – Citric Acid Passivation
    • Products
      • Benchtop Ultrasonic Passivation Equipment
      • Passivation Wet Bench for Citric / Nitric Acid
      • Ultrasonic Automated Passivation Equipment
      • Agitated Immersion Multi-Tank Passivation Systems
    • Case Studies
      • Automated Ultrasonic Passivation System for Medical Device Parts
      • Cleanroom Space Saving Automated Passivation System
      • Heated Polypropylene Acid Passivation and Rinse Tanks
      • Applicable Articles
  • Electropolishing Equipment
    • Product Information
      • What is Electropolishing? How Does Electropolishing Work?
      • Electropolishing Cycle and Current Calculator
      • What is Dry Electropolishing? How Does It Work?
      • Passivation vs. Electropolishing
    • Products
      • Table Top Electropolishing Equipment & Electropolishing Machines
      • Electropolishing Wet Benches
      • Large Scale Part Electropolishing Systems
      • Dry Electropolishing Machines
    • Case Studies
      • EP System – Open Top Wet Bench with Spray Rinse
  • Surface Finishing Systems
    • Alodine Lines
      • What is Alodine / Chem film / Chromate Conversion Coating?
      • Alodine Chem Film Tank Line
      • Hex Chrome Phase Out and Alternatives for Conversion Coating
    • Mass Finishing Machines
      • Centrifugal Barrel Finishing Machines
      • Vibratory Bowl Polishers
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      • Wet Benches for Semiconductor & FM4910 Applications
      • Wet Benches for Citric / Nitric Passivation of Stainless Steel and Titanium
      • Wet Benches for Electropolishing
      • Cascade Overflow Rinse Tanks
      • Quick Dump Rinse Tank
    • Case Studies
      • Semiconductor Chemical Processing Wet Bench and Fume Hood
  • Specialty & Custom Industrial Process Systems
    • Automated Chemical Neutralization Tank Cart
    • Vapor and Dryfilm PTFE Coating Systems
    • Heated Hot Air Parts Dryer
    • Solvent Recovery Equipment
  • Solvents, Fluids & Chemistries for Precision Cleaning
    • Product Information
      • Why Use a Parts Cleaning Solvent?
      • Solvent Cleaning with 3M Novec Engineered Fluids
      • Thermal Management / Heat Transfer with 3M Fluorinert and Novec Fluids
    • Products
      • 3M Novec Engineered Fluids, Fluorinert Liquids, Solvents & Chemicals
      • Aqueous Cleaning Chemistries
    • Solvent Phase-outs
      • 3M™ Novec™ HFE Engineered Fluids Replacement and PFAS Phase Out
      • nPB Replacement
      • AK225 HCFC-225 Phase Out and Replacement with 3M Novec HFE Engineered Fluids
    • Case Studies
      • 3M Novec 72DA 73DE Solvent Vapor Degreaser For Medical Device Instruments
  • Process Validation Templates
  • Equipment Financing

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