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home Best Technology / Wet Bench / Fume Hood for Electropolishing, Citric / Nitric Passivation, and Wet Chemical Processing / Quick Dump Rinse Tank DI Rinser for Ultrapure Water in Wet Processing Equipment

Quick Dump Rinse Tank DI Rinser for Ultrapure Water in Wet Processing Equipment

Quick Dump Rinse Tanks (QDR) are used to properly rinse semiconductor wafers, cassettes and other parts while conserving DI water.  Semiconductor wafer and cassette cleaning, etching, and stripping applications using KOH / HF and other chemical residues must be completely removed including in blind recesses and pockets to ensure chemicals do not continue to process (etch, strip, etc). Continued chemical processing after removal from wet process equipment can result in over etching, stripping, failed wafer patterns and other semiconductor failures.

How a Quick Dump Tank Works

The quick dump rinser fills deionized (DI) or ultrapure water from the bottom of the bath through nozzle manifold ports that direct the flow upward and around wafer part surface. The upward spray under immersion removes particles, chemicals, etc from the part.  The top of the tank has an overflow weir to discard the removed particulate and chemistry. When overflow is complete, the bottom quick dump door opens and the rinse water drains from the tank in a matter of seconds while nozzle sprayers on the top of tank keep the product wet with fresh, clean DI water during the dumping process. For high precision applications requiring extremely clean wafers, post process high flow cascade overflow rinse tanks to ensure all chemical and particulate is removed.

Quick-Dump-Rinse-Tank-Rinser for Semiconductor Wafers

Example of Quick Dump Tank

Proper rinsing ensures:

  1. Stopping the chemical reaction (stripping, etching, etc)
  2. Clean rinse water dragged out on parts from chemical wet processes.
  3. Complete contaminant, chemistry and particulate removal from the wafer or part

3 types of rinsing used depending on customer application especially in the semiconductor:

  1. Cascade overflow rinsing: wafers and parts are completely immersed into rinse tank and continuous overflow of fresh DI water inlet from the bottom and overflow at the surface
  2. Spray rinsing: An operator uses a spray wand to spray DI or ultrapure water or spray manifold at the top and sides of tank spray parts.
  3. Quick dump rinsing: utilizes both spray and overflow rinsing for wet bench process equipment which water is quickly evacuated from the tank flushing particulate and contaminants away from wafer parts.

cacasde overflow rinse tanks Resized

Cascade Overflow Rinse Tanks

Features and Options of Quick Dump Rinse Tanks

  • The four sided overflow weir helps break the surface tension and removes particles from the process area.
  • Minimal welds, corners, and sloped edges to prevent particle entrapment on tank surfaces
  • Nitrogen N2 agitation bubbler
  • Materials of Construction (application dependant): Polypropylene, Stainless Steel, PVDF, Teflon PTFE / PFA, PVC
  • Resistivity monitoring to ensure rinse water quality and wafers, cassettes, and parts are properly rinsed
  • DI water reclamation, recycling and reuse
  • Flowmeter for volumetric control
  • Hot DI Water compatible
  • Four sided cascading overflow weir
  • Standalone tank or build into full wet bench process line
  • A touch screen PLC allows part specific rinsing programs controlling number of rinse, high flow cascade and dump cycles.

Cascade Overflow with Quick Dump Rinse

Advantages of Quick Dump Tanks for Wet Process Equipment

  • Up to 80% DI water consumption reduction compared to overflow rinsing.
  • Up to 75% faster process times thru rinsing chemistry from the wafer and cassette surfaces more rapidly
  • Superior rinse performance of QDR tanks using surface spraying with less time and water

All our quick dump rinse tanks are sized to customer application, contact us to learn more about how quick dump rinse tanks can benefit your process.

 

 

 

 

Latest News & Products from Best Technology

Semi-Automated Inline Citric Passivation Solution with Data Tracking

For one medical device manufacturer, the design of a citric passivation solution faced two major challenges: The manufacturing process required performing a water-break test after cleaning parts, before proceeding to passivation. This meant that they could not use a fully automated passivation solution. The system had to have data tracking for quality control purposes. Semi-Automated […]

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14040 23rd Avenue N.  
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  • Request More Information
  • Industrial Parts Washers
    ✛
    • Agitated Immersion Heated Parts Washers
    • Inline Conveyor Wash-Rinse-Dry Parts Washers
    • Immersion Inline Parts Washer
    • Spray Cabinet Parts Washers
      ✛
      • Front Load Spray Cabinet Parts Washer
      • Top Load Spray Cabinet Industrial Parts Washer
    • Vertical Door Pass Through Parts Washer
    • Rotary Drum Parts Washer
    • Powder Coat Prep Equipment
    • Phosphating Lines
    • Pipe Washing Equipment
  • Precision Cleaning Systems
    ✛
    • Applicable Articles
    • How clean is clean?
    • How Do Ultrasonic Cleaners Work?
    • Ultrasonic Benchtop Parts Cleaner
    • Benchtop Ultrasonic Parts Cleaning Multi-Tank Systems
    • Ultrasonic Cleaning Consoles
    • Automated Ultrasonic Parts Cleaning Equipment Wash-Rinse-Dry
    • Large Scale Automated Precision Aqueous Cleaning for Cellular Manufacturing
    • Agitated Immersion Ultrasonic Parts Washer
    • Machine Shop Parts Washer for Swiss and CNC Precision Parts
    • Immersible Ultrasonic Transducers
    • Vapor Degreasers
  • Passivation Equipment
    ✛
    • Applicable Articles
    • What is Passivation? How Does It Work?
    • Nitric vs. Citric Acid Passivation
    • CitriSurf – Citric Acid Passivation
    • Benchtop Ultrasonic Passivation Equipment
    • Ultrasonic Automated Passivation Equipment
    • Automated Ultrasonic Passivation System for Medical Device Parts
    • Passivation Wet Bench for Citric / Nitric Acid
    • Cleanroom Space Saving Automated Passivation System
    • Heated Polypropylene Acid Passivation and Rinse Tanks
    • Agitated Immersion Multi-Tank Passivation Systems
    • Automated Chemical Neutralization Cart
  • Electropolishing Equipment
    ✛
    • What is electropolishing? How does electropolishing work?
    • Electropolishing Cycle and Current Calculator
    • What is Dry Electropolishing? How does it work?
    • Passivation vs. Electropolishing
    • Table Top Electropolishing Equipment & Electropolishing Machines
    • Electropolishing Wet Benches
    • Large Scale Part Electropolishing Systems
    • Dry Electropolishing Machines
    • EP System – Open Top Wet Bench with Spray Rinse
  • Surface Finishing Systems
    ✛
    • Alodine Lines
      ✛
      • What is Alodine / Chem film / Chromate Conversion Coating?
      • Alodine Chem Film Tank Line
    • Mass Finishing Machines
      ✛
      • Centrifugal Barrel Finishing Machines
      • Spin Dryers / Chip Wringers
      • Vibratory Bowl Polishers
    • Titanium Anodizing Equipment
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    ✛
    • Citric / Nitric Passivation Wet Bench for Stainless Steel & Titanium
    • Electropolishing Equipment in a Wet Bench / Fume Hood
    • Fume Hoods
    • Wet Benches for Semiconductor & FM4910 Applications
    • Quick Dump Rinse Tank
  • Specialty & Custom Industrial Process Systems
    ✛
    • Contents Restoration
    • Vapor and Dryfilm PTFE Coating Systems
    • Heated Hot Air Parts Dryer
    • Solvent Recovery Equipment
  • Precision Cleaning Chemistries, Solvents & Fluids
    ✛
    • Why Use a Parts Cleaning Solvent?
    • 3M Novec Engineered Fluids, Fluorinert Liquids, Solvents & Chemicals
    • Solvent Cleaning with 3M Novec Engineered Fluids
    • Thermal Management / Heat Transfer with 3M Novec and Fluorinert Fluids
    • 3M Novec 72DA 73DE Solvent Vapor Degreaser For Medical Device Instruments
    • Solvent Phase-outs
      ✛
      • AK225 HCFC-225 Phase Out and Replacement with 3M Novec HFE Engineered Fluids
      • Medical Device AK 225 Replacement with 3M Novec Engineered Fluid Solvent
      • nPB Replacement
    • Aqueous Cleaning Chemistries
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    ✛
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