• Products
    ✛
    • Industrial Parts Washers
    • Precision Cleaning Systems
    • Passivation Equipment
    • Electropolishing Equipment
    • Surface Finishing Systems
    • Mass Finishing Machines
    • Wet Benches
    • Specialty & Custom Industrial Process Systems
    • Precision Cleaning Chemistries, Solvents, & Fluids
    • 3M Novec Engineered Fluids, Chemicals, & Solvents
  • Industries
  • Articles
    ✛
    • FAQ – Frequently Asked Questions
    • Precision Cleaning
    • Passivation
    • Electropolishing
    • Industrial Parts Washers
    • Newsletters / Blog
  • Case Studies
    ✛
    • Industry Applications
    • Industrial Parts Washer Case Studies
    • Passivation Systems Case Studies
    • Part Cleaning Case Studies
    • Part Finishing Equipment Case Studies
    • Precision Cleaning Systems Case Studies
  • Testimonials
  • About Us
  • Contact Us

Contact us for info & free proposal!

More Info

Best Technology

Precision Cleaning, Passivation & Finishing Systems

Email UsEmail Us
Call Us612.392.2414
Speak to an Engineer
Request More Information
  • Products
    • Industrial Parts Washers
    • Precision Cleaning Systems
    • Passivation Equipment
    • Electropolishing Equipment
    • Surface Finishing Systems
    • Mass Finishing Machines
    • Wet Benches
    • Specialty & Custom Industrial Process Systems
    • Precision Cleaning Chemistries, Solvents, & Fluids
    • 3M Novec Engineered Fluids, Chemicals, & Solvents
  • Industries
  • Articles
    • FAQ – Frequently Asked Questions
    • Precision Cleaning
    • Passivation
    • Electropolishing
    • Industrial Parts Washers
    • Newsletters / Blog
  • Case Studies
    • Industry Applications
    • Industrial Parts Washer Case Studies
    • Passivation Systems Case Studies
    • Part Cleaning Case Studies
    • Part Finishing Equipment Case Studies
    • Precision Cleaning Systems Case Studies
  • Testimonials
  • About Us
  • Contact Us
Request More Information
Request Info

Contact an expert on
Wet Benches / Fume Hoods

More Info
home Best Technology / Wet Benches / Fume Hoods for Wet Chemical Processing of Semiconductors and Other Applications / Quick Dump Rinse Tank DI Rinser for Ultrapure Water in Wet Processing Equipment

Quick Dump Rinse Tank DI Rinser for Ultrapure Water in Wet Processing Equipment

Quick Dump Rinse Tanks (QDR) are used to properly rinse semiconductor wafers, cassettes and other parts while conserving DI water.  Semiconductor wafer and cassette cleaning, etching, and stripping applications using KOH / HF and other chemical residues must be completely removed including in blind recesses and pockets to ensure chemicals do not continue to process (etch, strip, etc). Continued chemical processing after removal from wet process equipment can result in over etching, stripping, failed wafer patterns and other semiconductor failures.

How a Quick Dump Tank Works

The quick dump rinser fills deionized (DI) or ultrapure water from the bottom of the bath through nozzle manifold ports that direct the flow upward and around wafer part surface. The upward spray under immersion removes particles, chemicals, etc from the part.  The top of the tank has an overflow weir to discard the removed particulate and chemistry. When overflow is complete, the bottom quick dump door opens and the rinse water drains from the tank in a matter of seconds while nozzle sprayers on the top of tank keep the product wet with fresh, clean DI water during the dumping process. For high precision applications requiring extremely clean wafers, post process high flow cascade overflow rinse tanks to ensure all chemical and particulate is removed.

Quick-Dump-Rinse-Tank-Rinser for Semiconductor Wafers

Example of Quick Dump Tank

Proper rinsing ensures:

  1. Stopping the chemical reaction (stripping, etching, etc)
  2. Clean rinse water dragged out on parts from chemical wet processes.
  3. Complete contaminant, chemistry and particulate removal from the wafer or part

3 types of rinsing used depending on customer application especially in the semiconductor:

  1. Cascade overflow rinsing: wafers and parts are completely immersed into rinse tank and continuous overflow of fresh DI water inlet from the bottom and overflow at the surface
  2. Spray rinsing: An operator uses a spray wand to spray DI or ultrapure water or spray manifold at the top and sides of tank spray parts.
  3. Quick dump rinsing: utilizes both spray and overflow rinsing for wet bench process equipment which water is quickly evacuated from the tank flushing particulate and contaminants away from wafer parts.

cacasde overflow rinse tanks Resized

Cascade Overflow Rinse Tanks

Features and Options of Quick Dump Rinse Tanks

  • The four sided overflow weir helps break the surface tension and removes particles from the process area.
  • Minimal welds, corners, and sloped edges to prevent particle entrapment on tank surfaces
  • Nitrogen N2 agitation bubbler
  • Materials of Construction (application dependant): Polypropylene, Stainless Steel, PVDF, Teflon PTFE / PFA, PVC
  • Resistivity monitoring to ensure rinse water quality and wafers, cassettes, and parts are properly rinsed
  • DI water reclamation, recycling and reuse
  • Flowmeter for volumetric control
  • Hot DI Water compatible
  • Four sided cascading overflow weir
  • Standalone tank or build into full wet bench process line
  • A touch screen PLC allows part specific rinsing programs controlling number of rinse, high flow cascade and dump cycles.

Cascade Overflow with Quick Dump Rinse

Advantages of Quick Dump Tanks for Wet Process Equipment

  • Up to 80% DI water consumption reduction compared to overflow rinsing.
  • Up to 75% faster process times thru rinsing chemistry from the wafer and cassette surfaces more rapidly
  • Superior rinse performance of QDR tanks using surface spraying with less time and water

All our quick dump rinse tanks are sized to customer application, contact us to learn more about how quick dump rinse tanks can benefit your process.

 

 

 

 

Latest News & Products from Best Technology

Semi-Automated Inline Citric Passivation Solution with Data Tracking

For one medical device manufacturer, the design of a citric passivation solution faced two major challenges: The manufacturing process required performing a water-break test after cleaning parts, before proceeding to passivation. This meant that they could not use a fully automated passivation solution. The system had to have data tracking for quality control purposes. Semi-Automated […]

Read More

  • Request More Information
  • Industrial Parts Washers
    • Agitated Immersion Heated Parts Washer
    • Phosphating Lines
    • Pipe Washing Equipment
    • Oil Removal Systems
    • Machine Shop Parts Washer for True Oil
    • Automotive Parts Washer System
  • Precision Cleaning Systems
    • Applicable Articles
    • How clean is clean?
    • How Do Ultrasonic Cleaners Work?
    • Ultrasonic Benchtop Parts Cleaner
    • Benchtop Ultrasonic Parts Cleaning Multi-Tank Systems
    • Ultrasonic Cleaning Consoles
    • Automated Ultrasonic Parts Cleaning Equipment Wash-Rinse-Dry
    • Agitated Immersion Ultrasonic Parts Washer
    • Machine Shop Parts Washer for Swiss and CNC Precision Parts
    • Immersible Ultrasonic Transducers
    • Vapor Degreasers
  • Passivation Equipment
    • Applicable Articles
    • What is Passivation? How Does It Work?
    • Nitric vs. Citric Acid Passivation
    • CitriSurf – Citric Acid Passivation
    • Benchtop Ultrasonic Passivation Equipment
    • Ultrasonic Automated Passivation Equipment
    • Automated Ultrasonic Passivation System for Medical Device Parts
    • Passivation Wet Bench for Citric / Nitric Acid
    • Cleanroom Space Saving Automated Passivation System
    • Heated Polypropylene Acid Passivation and Rinse Tanks
    • Agitated Immersion Multi-Tank Passivation Systems
  • Electropolishing Equipment
    • What is electropolishing? How does electropolishing work?
    • Electropolishing Cycle and Current Calculator
    • What is Dry Electropolishing? How does it work?
    • Passivation vs. Electropolishing
    • Table Top Electropolishing Equipment & Electropolishing Machines
    • Electropolishing Wet Benches
    • Large Scale Part Electropolishing Systems
    • Dry Electropolishing Machines
    • EP System – Open Top Wet Bench with Spray Rinse
  • Surface Finishing Systems
    • Alodine Lines
      • What is Alodine / Chem film / Chromate Conversion Coating?
      • Alodine Chem Film Tank Line
    • Mass Finishing Machines
      • Centrifugal Barrel Finishing Machines
      • Vibratory Bowl Polishers
    • Titanium Anodizing Equipment
  • Wet Benches
    • What is a fume hood? How do fume hoods work?
    • Fume Hoods
    • Wet Benches for Semiconductor & FM4910 Applications
    • Wet Benches for Citric / Nitric Passivation of Stainless Steel and Titanium
    • Wet Benches / Fume Hoods for Electropolishing
    • Semiconductor Chemical Processing Wet Bench and Fume Hood
    • Quick Dump Rinse Tank
  • Specialty & Custom Industrial Process Systems
    • Automated Chemical Neutralization Tank / Cart
    • Vapor and Dryfilm PTFE Coating Systems
    • Heated Hot Air Parts Dryer
    • Solvent Recovery Equipment
  • Precision Cleaning Chemistries, Solvents & Fluids
    • Why Use a Parts Cleaning Solvent?
    • 3M Novec Engineered Fluids, Fluorinert Liquids, Solvents & Chemicals
    • Solvent Cleaning with 3M Novec Engineered Fluids
    • Thermal Management / Heat Transfer with 3M Fluorinert and Novec Fluids
    • 3M Novec 72DA 73DE Solvent Vapor Degreaser For Medical Device Instruments
    • Solvent Phase-outs
      • AK225 HCFC-225 Phase Out and Replacement with 3M Novec HFE Engineered Fluids
      • Medical Device AK 225 Replacement with 3M Novec Engineered Fluid Solvent
      • nPB Replacement
    • Aqueous Cleaning Chemistries
  • Case Studies
    • Industrial Parts Washer Case Studies
    • Part Cleaning Case Studies
    • Passivation Systems Case Studies
    • Part Finishing Equipment Case Studies
    • Precision Cleaning Systems Case Studies
  • Services
  • Equipment Financing

Best Technology Inc.

14040 23rd Avenue N.
Minneapolis, MN 55447
Ph: 612.392.2414
Sales@BestTechnologyInc.com

Quick Links

  • Product Line Card
  • Case Studies
  • Site Map
  • Equipment Financing
  • Contact Us

Products

  • Industrial Parts Washers
  • Precision Cleaning Systems
  • Passivation Equipment
  • Electropolishing Equipment
  • Surface Finishing Systems
  • Wet Benches

Industries Served

  • Medical Device
  • Aerospace
  • Electronics
  • Automotive

Copyright © 2022 · Best Technology Inc.