Acceptable particle counts depend on the specification which the parts are processed to: ASTM A967, A380, F86, AMS 2700, etc. For passivation, DI rinse water is recommended for best results.
Our automated systems offer conductivity meters which monitor water quality and total dissolved solids.  The storage tanks have facility DI water source needle valves which open when conductivity limits are not met. This allows for a continual overflow of the rinse tank until rinse water specifications are reached.