• Industrial Parts Washers
    ✛
    • Products
      ✛
      • Agitated Immersion Heated Parts Washer
      • Automatic Parts Washer System with Conveyor
      • Phosphating Lines
      • Oil Removal Systems
    • Case Studies
      ✛
      • Pipe Washing Equipment
      • Machine Shop Parts Washer for True Oil
      • Automotive Parts Washer System
  • Ultrasonic Cleaning Systems
    ✛
    • Product Information
      ✛
      • How Clean is Clean?
      • How Do Ultrasonic Cleaners Work?
    • Products
      ✛
      • Ultrasonic Benchtop Parts Cleaner
      • Benchtop Ultrasonic Parts Cleaning Multi-Tank Systems
      • Ultrasonic Cleaning Consoles
      • Automated Ultrasonic Parts Cleaning Equipment Wash-Rinse-Dry
      • Large Ultrasonic Cleaner with Agitated Immersion
      • Immersible Ultrasonic Transducers
      • Vapor Degreasers
    • Case Studies
      ✛
      • Machine Shop Parts Washer for Swiss and CNC Precision Parts
      • Applicable Articles
  • Passivation Equipment
    ✛
    • Product Information
      ✛
      • What is Passivation? How Does It Work?
      • Nitric vs. Citric Acid Passivation
      • CitriSurf – Citric Acid Passivation
    • Products
      ✛
      • Benchtop Ultrasonic Passivation Equipment
      • Passivation Wet Bench for Citric / Nitric Acid
      • Ultrasonic Automated Passivation Equipment
      • Agitated Immersion Multi-Tank Passivation Systems
    • Case Studies
      ✛
      • Automated Ultrasonic Passivation System for Medical Device Parts
      • Cleanroom Space Saving Automated Passivation System
      • Heated Polypropylene Acid Passivation and Rinse Tanks
      • Applicable Articles
  • Electropolishing Equipment
    ✛
    • Product Information
      ✛
      • What is Electropolishing? How Does Electropolishing Work?
      • Electropolishing Cycle and Current Calculator
      • What is Dry Electropolishing? How Does It Work?
      • Passivation vs. Electropolishing
    • Products
      ✛
      • Table Top Electropolishing Equipment & Electropolishing Machines
      • Electropolishing Wet Benches
      • Large Scale Part Electropolishing Systems
      • Dry Electropolishing Machines
    • Case Studies
      ✛
      • EP System – Open Top Wet Bench with Spray Rinse
  • Surface Finishing Systems
    ✛
    • Alodine Lines
      ✛
      • What is Alodine / Chem film / Chromate Conversion Coating?
      • Alodine Chem Film Tank Line
      • Hex Chrome Phase Out and Alternatives for Conversion Coating
    • Mass Finishing Machines
      ✛
      • Centrifugal Barrel Finishing Machines
      • Vibratory Bowl Polishers
    • Titanium Anodizing
      ✛
      • What is Titanium Anodizing?
      • Titanium Anodizing Equipment
  • Wet Benches
    ✛
    • Product Information
      ✛
      • What is a Fume Hood? How Do Fume Hoods Work?
    • Products
      ✛
      • Fume Hoods
      • Wet Benches for Semiconductor & FM4910 Applications
      • Wet Benches for Citric / Nitric Passivation of Stainless Steel and Titanium
      • Wet Benches for Electropolishing
      • Cascade Overflow Rinse Tanks
      • Quick Dump Rinse Tank
    • Case Studies
      ✛
      • Semiconductor Chemical Processing Wet Bench and Fume Hood
  • Specialty & Custom Industrial Process Systems
    ✛
    • Automated Chemical Neutralization Tank Cart
    • Vapor and Dryfilm PTFE Coating Systems
    • Heated Hot Air Parts Dryer
    • Solvent Recovery Equipment
  • Solvents, Fluids & Chemistries for Precision Cleaning
    ✛
    • Product Information
      ✛
      • Why Use a Parts Cleaning Solvent?
      • Solvent Cleaning with 3M Novec Engineered Fluids
      • Thermal Management / Heat Transfer with 3M Fluorinert and Novec Fluids
    • Products
      ✛
      • 3M Novec Engineered Fluids, Fluorinert Liquids, Solvents & Chemicals
      • Aqueous Cleaning Chemistries
    • Solvent Phase-outs
      ✛
      • 3M™ Novec™ HFE Engineered Fluids Replacement and PFAS Phase Out
      • nPB Replacement
      • AK225 HCFC-225 Phase Out and Replacement with 3M Novec HFE Engineered Fluids
    • Case Studies
      ✛
      • 3M Novec 72DA 73DE Solvent Vapor Degreaser For Medical Device Instruments
  • Process Validation Templates
  • Equipment Financing

"*" indicates required fields

Contact us for info & free proposal!

More Info

Best Technology

Precision Cleaning, Passivation & Finishing Systems

Email UsEmail Us
Call Us612.392.2414
Contact an Expert
  • Products
    • Industrial Parts Washers
    • Ultrasonic Cleaning Systems
    • Passivation Equipment
    • Electropolishing Equipment
    • Surface Finishing Systems
    • Mass Finishing Machines
    • Wet Benches
    • Specialty & Custom Industrial Process Systems
    • Solvents, Fluids & Chemistries for Precision Cleaning
    • 3M™ Novec™ Engineered Fluids, Chemicals, & Solvents
    • 3M™ Novec™ HFE Engineered Fluids Replacement and PFAS Phase Out
  • Industries
  • Articles
    • FAQ – Frequently Asked Questions
    • Ultrasonic Cleaning
      • How Do Ultrasonic Cleaners Work?
    • Passivation
      • What is Passivation?
    • Electropolishing
      • What is Electropolishing?
    • Surface Finishing
      • What is Alodine / Chem film / Chromate Conversion Coating?
      • What is Titanium Anodizing?
    • Industrial Parts Washers
  • Case Studies
    • Industry Applications
    • Industrial Parts Washer Case Studies
    • Passivation Systems Case Studies
    • Part Cleaning Case Studies
    • Part Finishing Equipment Case Studies
    • Ultrasonic Cleaning Systems Case Studies
  • Testimonials
  • About Us
  • Contact Us
Contact an Expert
Request Info

Contact an expert

More Info
home Best Technology / Case Studies – Industry Applications / Semiconductor Wafer Chemical Processing FM4910 Wet Bench & Fume Hood

Semiconductor Wafer Chemical Processing FM4910 Wet Bench & Fume Hood

Application for Semiconductor Wafer Chemical Processing Wet Bench & Fume Hood Case Study

Our semiconductor customer required processing of large metallic and quartz parts used for wafer manufacturing. The chemistries used for processing included HF-Hydrogen Fluoride / Hydrofluoric Acid, H2NO3-Carbonic Acid, and H2O-Water which required use of PVDF (Polyvinylidene fluoride) tanks, plumbing and components.  The entire system is constructed from FM4910 compliant PVDF and PVC-C Polyvinylchloride.

 

Video: Semiconductor Chemical Processing Wet Bench & Fume Hood

Semiconductor Wafer Chemical Processing Wet Bench

 

Details on Semiconductor Chemical Processing Wet Bench & Fume Hood

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---Sliding-Door-Open---Up

Vertical Slide Up Doors – Open – Semiconductor Chemical Processing

FM4910 PVC-C Wet Bench & Fume Hood

Slide up, counter weighted doors ensure easy, unrestricted access loading parts into the large 6 ft long x 3 ft wide PVDF tank.

 

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---Sliding-Doors-Closed---Down

Vertical Slide Up Doors – Closed – Semiconductor Chemical Processing

FM4910 PVC-C Wet Bench & Fume Hood

When the chemical processing tanks are not in use by operators, the doors slide down sealing of chemical solutions from the environment and further allow the fume hood extraction ventilation to remove any fumes from the wet bench cabinet.

 

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---PVDF-Tanks

Integrated PVDF Tanks with Perforated Drainage Shelf

HF-Hydrogen Fluoride / Hydrofluoric Acid, H2NO3-Carbonic Acid, and H2O-Water are used to process wafers and parts; therefore, the tanks are constructed of chemically compatible PVDF tanks which are sloped to drain and have a perforated shelf to allow parts to dry within the wet bench fume hood.  3″ PDVF quick dump valves allow for quick tank drainage after use.

 

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---Wafer-Processing-Tanks

Wafer Processing Tanks, N2 Drying Gun and DI Water Spray Gun

To properly rinse and dry parts, a DI water spray gun and Nitrogen (N2) drying gun are mounted to the side wall of each wet bench for easy access during part processing.  Beyond processing ceramic and metal parts, PVDF wafer processing tanks were built to set on the perforated PVDF shelf.

 

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---Chemical-Faucet-Foot-Pedal-Switch

Foot Pedal Switch Actuation of Gooseneck Chemical Faucet

The foot pedal in front of each wet bench allows for hands free actuation of PVDF gooseneck chemical and DI water faucet.

 

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---Chemical-Storage-Compartment

Integrated Chemical Storage Compartment with Spill Tray

Chemical storage tray has independent containment area than the rest of the wet bench.  The entire wet bench has a four sided spill lip with spill detection interlock that turns off the master inlet solenoids should the spill sensors detect a chemical spill.  The entire enclosure under the tanks is independently isolated and exhausted from the chemical processing enclosure above.

 

Semiconductor-Wafer-Chemical-Processing-Wet-Bench-&-Fume-Hood---Magnahelic-Gauge

Magnehelic Gauge to Ensure Proper Fume Extraction Rate

A magnehelic gauge allow for operators to easily check and make sure the fume hood extraction system is running properly.

 

Industry

Electronic, Semiconductor, Circuit Board

 

Applicable Systems

 Wet Bench for Semiconductor & Other FM4910 Applications

 

 

 

Latest News & Products from Best Technology

Semi-Automated Inline Citric Passivation Solution with Data Tracking

For one medical device manufacturer, the design of a citric passivation solution faced two major challenges: The manufacturing process required performing a water-break test after cleaning parts, before proceeding to passivation. This meant that they could not use a fully automated passivation solution. The system had to have data tracking for quality control purposes. Semi-Automated […]

Read More

  • Industrial Parts Washers
    • Products
      • Agitated Immersion Heated Parts Washer
      • Automatic Parts Washer System with Conveyor
      • Phosphating Lines
      • Oil Removal Systems
    • Case Studies
      • Pipe Washing Equipment
      • Machine Shop Parts Washer for True Oil
      • Automotive Parts Washer System
  • Ultrasonic Cleaning Systems
    • Product Information
      • How Clean is Clean?
      • How Do Ultrasonic Cleaners Work?
    • Products
      • Ultrasonic Benchtop Parts Cleaner
      • Benchtop Ultrasonic Parts Cleaning Multi-Tank Systems
      • Ultrasonic Cleaning Consoles
      • Automated Ultrasonic Parts Cleaning Equipment Wash-Rinse-Dry
      • Large Ultrasonic Cleaner with Agitated Immersion
      • Immersible Ultrasonic Transducers
      • Vapor Degreasers
    • Case Studies
      • Machine Shop Parts Washer for Swiss and CNC Precision Parts
      • Applicable Articles
  • Passivation Equipment
    • Product Information
      • What is Passivation? How Does It Work?
      • Nitric vs. Citric Acid Passivation
      • CitriSurf – Citric Acid Passivation
    • Products
      • Benchtop Ultrasonic Passivation Equipment
      • Passivation Wet Bench for Citric / Nitric Acid
      • Ultrasonic Automated Passivation Equipment
      • Agitated Immersion Multi-Tank Passivation Systems
    • Case Studies
      • Automated Ultrasonic Passivation System for Medical Device Parts
      • Cleanroom Space Saving Automated Passivation System
      • Heated Polypropylene Acid Passivation and Rinse Tanks
      • Applicable Articles
  • Electropolishing Equipment
    • Product Information
      • What is Electropolishing? How Does Electropolishing Work?
      • Electropolishing Cycle and Current Calculator
      • What is Dry Electropolishing? How Does It Work?
      • Passivation vs. Electropolishing
    • Products
      • Table Top Electropolishing Equipment & Electropolishing Machines
      • Electropolishing Wet Benches
      • Large Scale Part Electropolishing Systems
      • Dry Electropolishing Machines
    • Case Studies
      • EP System – Open Top Wet Bench with Spray Rinse
  • Surface Finishing Systems
    • Alodine Lines
      • What is Alodine / Chem film / Chromate Conversion Coating?
      • Alodine Chem Film Tank Line
      • Hex Chrome Phase Out and Alternatives for Conversion Coating
    • Mass Finishing Machines
      • Centrifugal Barrel Finishing Machines
      • Vibratory Bowl Polishers
    • Titanium Anodizing
      • What is Titanium Anodizing?
      • Titanium Anodizing Equipment
  • Wet Benches
    • Product Information
      • What is a Fume Hood? How Do Fume Hoods Work?
    • Products
      • Fume Hoods
      • Wet Benches for Semiconductor & FM4910 Applications
      • Wet Benches for Citric / Nitric Passivation of Stainless Steel and Titanium
      • Wet Benches for Electropolishing
      • Cascade Overflow Rinse Tanks
      • Quick Dump Rinse Tank
    • Case Studies
      • Semiconductor Chemical Processing Wet Bench and Fume Hood
  • Specialty & Custom Industrial Process Systems
    • Automated Chemical Neutralization Tank Cart
    • Vapor and Dryfilm PTFE Coating Systems
    • Heated Hot Air Parts Dryer
    • Solvent Recovery Equipment
  • Solvents, Fluids & Chemistries for Precision Cleaning
    • Product Information
      • Why Use a Parts Cleaning Solvent?
      • Solvent Cleaning with 3M Novec Engineered Fluids
      • Thermal Management / Heat Transfer with 3M Fluorinert and Novec Fluids
    • Products
      • 3M Novec Engineered Fluids, Fluorinert Liquids, Solvents & Chemicals
      • Aqueous Cleaning Chemistries
    • Solvent Phase-outs
      • 3M™ Novec™ HFE Engineered Fluids Replacement and PFAS Phase Out
      • nPB Replacement
      • AK225 HCFC-225 Phase Out and Replacement with 3M Novec HFE Engineered Fluids
    • Case Studies
      • 3M Novec 72DA 73DE Solvent Vapor Degreaser For Medical Device Instruments
  • Process Validation Templates
  • Equipment Financing

Best Technology Inc.

14040 23rd Avenue N.
Minneapolis, MN 55447
Ph: 612.392.2414
Sales@BestTechnologyInc.com

Quick Links

  • Product Line Card
  • Case Studies
  • Site Map
  • Equipment Financing
  • Contact Us

Products

  • Industrial Parts Washers
  • Ultrasonic Cleaning Systems
  • Passivation Equipment
  • Electropolishing Equipment
  • Surface Finishing Systems
  • Wet Benches

Industries Served

  • Medical Device
  • Aerospace
  • Electronics
  • Automotive

Copyright © 2023 · Best Technology Inc.